I. Basic Accuracy Verification
1. Repeatability Test: Measure 20 times consecutively using a standard part. The repeatability accuracy should be ≤0.8μm (≤0.3μm for high-precision models). If the standard deviation is >1.2μm, calibration is required.
2. Systematic Error Detection: Measure standard parts of different sizes (e.g., 10mm, 50mm, 100mm). If the deviation is consistently >±2.5μm, compensation is required.
3. Geometric Accuracy Verification:
Guide rail straightness: Error per meter >2μm
Worktable flatness: Full stroke error >3μm
Three-axis perpendicularity: Angular error >5 arcseconds.
II. Probe System Evaluation
Calibration ball diameter consistency: If the measurement difference in different directions by the same probe is >0.8μm or the roundness error is >0.5μm, recalibration is required.
Multi-probe consistency: If the deviation of each probe measuring the same dimension is >2μm, the probe relationship needs calibration.
III. Temperature and Maintenance Inspection
Temperature Stability: Ambient temperature changes > ±0.5℃ may affect accuracy.
Daily Maintenance: Regularly clean and inspect the positioning holes for wear (such as increased size or deformation); repair or replacement is necessary in severe cases.
